Description
- Origin: Mainland China
- Type: Air Purifier Parts
Micro-capacitance MEMS optical gas biosensor photoelectric detection
Model No.1: Gap-5um
1,Form factor: 4mm*7mm*0.52mm;
2,Electrode pitch 5μm;
3,Electrode substrate is monocrystalline silicon (P-type), Si02 is grown on the surface of silicon wafer, thickness is 300nm;
4, Metal layer structure: Cr/Au, thickness 30nm, 100nm respectively;
5,Electrode temperature range: -150℃~500℃;
6,Mainly used in various chemical, physical and medical sensors, reliable performance and stable quality.