- Origin: Mainland China
- Type: Air Purifier Parts
5 micron silicon based fork finger gold electrode photoelectric detection sensor chip MEMS high precision
1,The electrode substrate is single crystal silicon (P type), Si02 is grown on the surface of silicon wafer, and the thickness is 300nm;
Dimension: 4mm*7mm*0. 52mm.
2,Line width: 5um, line spacing: 5m, finger length: 1.5mm, fork finger pairs: 100(200 fingers).
3. Metal layer structure: Ti/Au, thickness 30nm, 100nm respectively:
4,Temperature range of electrode: -150℃~500℃
5,Mainly used in various chemical, physical and medical sensors, reliable performance and stable quality.