• Thu. Feb 2nd, 2023

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5PCS 3μm silicon based fork finger electrode capacitive array MEMS gas biosensor electrochemical photoelectric detection

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5PCS 3μm silicon based fork finger electrode capacitive array MEMS gas biosensor electrochemical photoelectric detection

$114.80

3487 in stock

SKU: 3256804628237297 Category:

Description

  • Origin: Mainland China
  • Type: Hand Dryer Parts

3 micron silicon based fork finger electrode gas humidity biosensor chip

1,Form factor: 4mm*7mm*0. 52mm.

2,Line width: 5m,Line spacing: 3um,Finger length: 1.6mm,Finger pairs: 75(150 fingers).

3,Electrode substrate is monocrystalline silicon, silicon dioxide is grown on the surface of silicon wafer, thickness is 300nm;

4, Metal layer structure: Ti/Au, thickness 30nm, 100nm respectively;

5,Electrode temperature range: -150℃~500℃;

6,Mainly used in various chemical, physical and medical sensors, reliable performance and stable quality.