Description
- Origin: Mainland China
- Type: Hand Dryer Parts
10 micron silicon based fork finger electrode capacitive array gas humidity biosensor chip MEMS
1-Form factor: 4mm*7mm*0.52mm.
2,Line width: 10m,Line spacing: 10um,Finger length: 1.6mm,Finger pairs: 50(100 fingers) 3,Electrode substrate is monocrystalline silicon, silicon dioxide is grown on the surface of the wafer, thickness is 300nm;
4, Metal layer structure: Ti/Au, thickness 30nm, 100nm respectively;
5,Electrode temperature range: -150℃~500℃;
6,Mainly used in various chemical, physical and medical sensors, reliable performance and stable quality.
