• Wed. Jun 19th, 2024

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5PCS 10μm silicon based fork finger electrode high precision and high stability MEMS gas biosensor photoelectric detection

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5PCS 10μm silicon based fork finger electrode high precision and high stability MEMS gas biosensor photoelectric detection

$100.80

4432 in stock

SKU: 3256804628160195 Category:

Description

  • Origin: Mainland China
  • Type: Hand Dryer Parts

10 micron silicon based fork finger electrode capacitive array gas humidity biosensor chip MEMS

1-Form factor: 4mm*7mm*0.52mm.

2,Line width: 10m,Line spacing: 10um,Finger length: 1.6mm,Finger pairs: 50(100 fingers) 3,Electrode substrate is monocrystalline silicon, silicon dioxide is grown on the surface of the wafer, thickness is 300nm;

4, Metal layer structure: Ti/Au, thickness 30nm, 100nm respectively;

5,Electrode temperature range: -150℃~500℃;

6,Mainly used in various chemical, physical and medical sensors, reliable performance and stable quality.