Description
- Origin: Mainland China
- Type: Hand Dryer Parts
Micrometer silicon based fork finger electrodes for biogas humidity optical sensors
1,The electrode substrate is monocrystalline silicon (P type), Si02 is grown on the surface of the silicon wafer, and the thickness is 300nm;
Dimension: 5mm*8mm*0. 52mm.
2,Line spacing: 1um, line width: 5um, finger length: 1.8mm, fork finger pairs: 100(200 fingers).
3, Metal layer structure: Cr/Au, thickness 30nm, 100nm respectively;
4,Temperature range of electrode:
-150℃~500℃;
5,Mainly used in various chemical, physical and medical sensors, reliable performance and stable quality.
