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20μm silicon based fork finger electrode capacitive array MEMS gas biosensor with high stability for photoelectric detection

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20μm silicon based fork finger electrode capacitive array MEMS gas biosensor with high stability for photoelectric detection

$92.40

7373 in stock

SKU: 3256804628175074 Category:

Description

  • Origin: Mainland China
  • Type: Hand Dryer Parts

20 micron single crystal silicon fork finger electrode gas humidity biosensor chip MEMS high precision

1,Form factor: 4mm*7mm*0.52mm.

2,Line width: 20um,Line spacing: 20um,Finger length: 1.6mm,Finger pairs: 30 (60 fingers).

3,Electrode substrate is monocrystalline silicon, silicon dioxide is grown on the surface of silicon wafer, thickness is 300nm;

4, Metal layer structure: Ti/Au, thickness 30nm, 100nm respectively;

5-Electrode temperature range: -150℃~500℃;

6,Mainly used in various chemical, physical and medical sensors, reliable performance and stable quality.