Description
- Origin: Mainland China
- Type: Hand Dryer Parts
20 micron single crystal silicon fork finger electrode gas humidity biosensor chip MEMS high precision
1,Form factor: 4mm*7mm*0.52mm.
2,Line width: 20um,Line spacing: 20um,Finger length: 1.6mm,Finger pairs: 30 (60 fingers).
3,Electrode substrate is monocrystalline silicon, silicon dioxide is grown on the surface of silicon wafer, thickness is 300nm;
4, Metal layer structure: Ti/Au, thickness 30nm, 100nm respectively;
5-Electrode temperature range: -150℃~500℃;
6,Mainly used in various chemical, physical and medical sensors, reliable performance and stable quality.
